Electron beam lithography

Resist characteristics simulation of HSQ electron beam resist

Hydrogen Silsesquioxane (HSQ) is used as a high-resolution resist with resolution down below 10 nm half-pitch. High-contrast and high-resolution patterning in the negative electron beam HSQ resist has numerous potential applications. ...  read more

Performance of the XR 1541 negative e-beam resist in the e-beam lithography for chosen substrate materials

In this paper the negative HSQ (hydrogen silsesquioxane) XR 1541 electron beam resist is investigated in terms of its performance in the e-beam lithography for chosen substrate materials, namely for silicon, Ag on Si substrates, and ...  read more

Design, construction and preliminary results of a pulsed electron beam facility for surface modification of materials

The object of the pulsed Electron beam designed in this work is to modify the surface layer of metals by melting through uniform adiabatic heating in the order of a few microseconds. With a maximum diameter of the beam 70 mm, current ...  read more

Deposition of metallurgical and dielectric coatings by electron beam and comparison with sputtering and thermal evaporation methods of coating

Torr International has made many electron beams systems for many applications such as hard coating, lift off and optical applications. The electron gun employed in e beam coating is with a 270 deg bent beam, in order for the source ...  read more

Improved surface properties of nodular cast iron using electron beam remelting and alloying with nickel based additives

Surface remelting has been used for improving the tribological behaviour of components, e.g. camshafts, for many years. Growing demands for the simultaneous improvement of wear and corrosion resistance of components with complex geometries ...  read more

Control of modified surface layer thickness in pulsed large-area EB irradiation

In pulsed large-area EB irradiation method, wide area of metal surface can be instantly melted and the surface roughness can be decreased efficiently. This finishing method is already applied to metal molds. In addition, the surface ...  read more

Pulsed electron beams for surface finish of laser or electron beam sintered metal articles

The paper presents research results on pulsed electron beam surface finish of porous metal articles obtained by selective powder sintering. On the example of VT6 alloy, it is shown that surface finish with a pulsed electron beam in ...  read more

Effect of craters on deep hardening under pulsed electron beam

By comparing the behavior of two types of 316L stainless steels under the high current pulsed electron beam (HCPEB) irradiation treatment, it is demonstrated experimentally that the burst of eruptive craters through the surface has ...  read more

The new condensed from vapor phase composite materials based on copper and their applications

The paper presents the method of electron beam vacuum evaporation and condensation for the most promising technologies of manufacturing modern composite materials, used in welding and switching equipment. This method currently is one ...  read more

Corrosion resistance of Ti-Ta-Nb and Ti-Ta-Zr coatings fabricated on VT14 Titanium alloy substrates using electron beam injected into the atmosphere

In this study corrosion resistance of the coatings obtained on VТ14 (4% Al, 3% Mo, Ti – the rest) titanium alloy substrates using focused electron beam with an energy of 1.4 MeV injected into the atmosphere was discussed. The two-layered ...  read more